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. Author manuscript; available in PMC: 2016 May 27.
Published in final edited form as: Appl Phys Rev. 2016 Mar 24;3(1):011302. doi: 10.1063/1.4944491

FIG. 25.

FIG. 25

Projected performance of a Cs+ cold atom beam source for beam energies of 4 keV, 10 keV and 30 keV, together with LMIS data at 30 keV. d50 is the diameter into which 50 % of the total beam current falls in the focal plane. Nominal focusing lens aberrations Cc = 30 mm and Cs= 100 mm are assumed. At each current, an optimum extraction field and corresponding energy spread were chosen to minimize the spot size (from Ref. 172, ISTFA 2014: Proceedings from the 40th International Symposium for Testing and Failure Analysis by ASM International. Reproduced with permission of ASM International in the format Journal/magazine via Copyright Clearance Center.).