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Simplified mechanics model of a quarter of the circle resonator. (a) Simulating the operation mode under external forces, and exerting external generalized unit forces FM1, FM2, MM. Numbering the microbeams from No. 1 to No. 9. Identifying the axes of symmetric position with a dotted line; (b) Naming the accompanied internal generalized unit forces FB1, FB2, and MB, when the circle resonator is under external forces.
