Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
Measurement uncertainty of differential capacitive sensor.
| Error Sources | Uncertainty (μm) |
|---|---|
| Residual error between the measurement value and linearity value | 0.6 |
| Movement along x-axis | 0.25 |
| Movement along y-axis | 0.15 |
| Short-time vibration | 0.08 |
| Combined | 0.67 |
