Table 3.
Geometric Feature | Setups I to IV, Nominal Dimension (μm) | Setup V to VIII, Nominal Dimension (μm) |
---|---|---|
wa | 750 | 200 |
ra | 1000 | 1000 |
wb | 750 | 200 |
rb | 1000 | 1000 |
wc | 750 | 200 |
rc | 1000 | 1000 |
wx | 750 | 200 |
wy | 750 | 200 |
wz | 750 | 200 |
Geometric Feature | Setups I to IV, Nominal Dimension (μm) | Setup V to VIII, Nominal Dimension (μm) |
---|---|---|
wa | 750 | 200 |
ra | 1000 | 1000 |
wb | 750 | 200 |
rb | 1000 | 1000 |
wc | 750 | 200 |
rc | 1000 | 1000 |
wx | 750 | 200 |
wy | 750 | 200 |
wz | 750 | 200 |