Table 4.
Deign parameters of the three-axis controllers in vacuum.
| Parameters | X/Y | Z |
|---|---|---|
| Kc | X: 320; Y: 204 | 16 |
| T1 (s) | 1/100 | 1/120 |
| T2 (s) | 1/2.5 | 1/3 |
| t1 (s) | 1/850 | 1/2200 |
| t2 (s) | 1/8500 | 1/30,000 |
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