Table 1.
Performance of the micro-force sensor.
| Performance Parameters | Value |
|---|---|
| Sensitivity | 0.0257 mV/μN |
| Nonlinearity | 1.28% FS |
| Zero drift | 53.07% FS |
| Cross-sensitivity with Fx | 0.82% FS |
| Cross-sensitivity with Fy | 1.24% FS |
Performance of the micro-force sensor.
| Performance Parameters | Value |
|---|---|
| Sensitivity | 0.0257 mV/μN |
| Nonlinearity | 1.28% FS |
| Zero drift | 53.07% FS |
| Cross-sensitivity with Fx | 0.82% FS |
| Cross-sensitivity with Fy | 1.24% FS |