Fig. 2.

(a) Lateral profiles of a sharp metal edge measured by GR-PAM and 3-D-scanning conventional optical-resolution microscopy (OR-PAM). The values of FWHM of the profiles from GR-PAM and 3-D-scanning conventional OR-PAM are $\sim 0.7$ and $1.0\mu \mathrm{m}$, respectively. (b) Axial profiles of a thin layer of ink acquired by GR-PAM and 3-D-scanning conventional OR-PAM. The FWHMs of the profiles from GR-PAM and 3-D-scanning conventional OR-PAM are 12.5 and $80\mu \mathrm{m}$, respectively. ESFs, edge spread functions; LSFs, line spread functions.