Fig. 13.
WYKO 6000 Phase measuring interferometer flatness measurement of the x-ray mask surface demonstrating a 0.5 μm peak-to-valley variation across the surface of the mask (courtesy of Mr. Chris Evans).
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.