U11	U22	U33	U12	U13	U23
C1	0.0571 (19)	0.0411 (15)	0.0529 (18)	−0.0044 (13)	0.0093 (14)	0.0021 (13)
C2	0.0536 (18)	0.0405 (14)	0.0496 (17)	−0.0054 (13)	0.0070 (14)	0.0018 (12)
C3	0.069 (2)	0.0407 (15)	0.0609 (19)	−0.0060 (14)	0.0160 (16)	0.0012 (14)
C4	0.083 (2)	0.0481 (17)	0.0431 (17)	−0.0152 (16)	0.0113 (16)	−0.0028 (13)
C5	0.067 (2)	0.0531 (17)	0.0517 (18)	−0.0163 (15)	0.0001 (15)	0.0063 (14)
C6	0.0516 (18)	0.0417 (15)	0.0586 (19)	−0.0056 (13)	0.0047 (14)	0.0059 (13)
C7	0.081 (2)	0.0542 (19)	0.070 (2)	0.0002 (17)	0.0032 (18)	0.0008 (16)
C8	0.082 (2)	0.0443 (17)	0.081 (2)	0.0001 (17)	0.011 (2)	0.0028 (17)
C9	0.079 (2)	0.0543 (19)	0.072 (2)	0.0136 (17)	0.0130 (19)	0.0148 (16)
C10	0.082 (2)	0.064 (2)	0.057 (2)	0.0059 (18)	0.0108 (17)	−0.0026 (16)
C11	0.084 (2)	0.062 (2)	0.064 (2)	0.0043 (18)	0.0063 (18)	0.0165 (16)
C12	0.071 (2)	0.0494 (17)	0.074 (2)	0.0102 (15)	0.0029 (18)	0.0093 (16)
N1	0.0543 (16)	0.0428 (13)	0.0625 (17)	−0.0019 (12)	0.0015 (13)	−0.0003 (12)
N2	0.136 (3)	0.0584 (18)	0.0513 (18)	−0.0198 (18)	0.0169 (18)	−0.0022 (15)
N3	0.0695 (19)	0.0586 (16)	0.0659 (18)	0.0079 (14)	0.0087 (15)	0.0137 (15)
N4	0.080 (2)	0.0445 (15)	0.0593 (17)	0.0116 (14)	0.0079 (15)	0.0077 (13)
N5	0.075 (2)	0.0482 (16)	0.0624 (18)	0.0046 (13)	0.0103 (15)	−0.0023 (13)
N6	0.0765 (19)	0.0439 (14)	0.0593 (17)	0.0071 (13)	−0.0008 (14)	0.0020 (13)
N7	0.0655 (17)	0.0490 (14)	0.0513 (15)	0.0082 (12)	0.0033 (12)	0.0009 (12)
O1	0.1065 (18)	0.0453 (11)	0.0493 (13)	0.0069 (11)	0.0120 (12)	0.0007 (9)
O2	0.0857 (17)	0.0755 (15)	0.0519 (14)	0.0201 (12)	0.0063 (12)	0.0082 (11)
O3	0.0627 (15)	0.0675 (14)	0.0969 (18)	0.0187 (12)	0.0090 (13)	0.0079 (12)
O4	0.244 (4)	0.0713 (18)	0.0722 (18)	0.027 (2)	0.046 (2)	−0.0084 (14)
O5	0.153 (3)	0.106 (2)	0.0549 (16)	−0.0167 (19)	−0.0024 (17)	−0.0058 (14)
O6	0.148 (3)	0.0690 (15)	0.0753 (17)	0.0389 (16)	0.0009 (16)	−0.0061 (14)
O7	0.095 (2)	0.0828 (18)	0.111 (2)	0.0201 (15)	−0.0245 (17)	0.0184 (15)