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. 1992 Mar-Apr;97(2):253–265. doi: 10.6028/jres.097.007

Table 3.

Error budget for a single 3 μm center distance measurement, using CDP

Category Error source Error contribution (μm)
Systematic Random
On-axis magnification Stage micrometer calibration 0.0068
Film measuring machine calibration 0.0001
Film readout, emulsion shifts, and magnification scatter (5 exposures) 0.0053
Image distortion uncertainty 0.0020
0.0089
Center distance measurement Film readout and emulsion shifts 0.017
Magnification scatter 0.008
Image distortion-worst case 0.025
Sphere flattening on contact 0.002
Non-sphericity 0.030
Subtotals 0.0089 0.043
Finite sample size (N = 4600) Diameter distribution width 0.095
Totals 0.0089 0.104
a

Uncertainty in D¯/0.0089+0.104/4600=0.011 μm. Measured D¯ (after correction, see Sec. 4.1.2): 2.977 μm.