Skip to main content
. Author manuscript; available in PMC: 2017 Apr 1.
Published in final edited form as: Ultramicroscopy. 2016 Feb 17;163:75–86. doi: 10.1016/j.ultramic.2016.02.001

Fig. 4.

Fig. 4

(a) Plot of elastic elevation gradient of the Si surface across the center of the wedge indentation as measured by EBSD and calculated from AFM. (b) Plot of the elevation of the Si surface across the center of the wedge indentation as measured by AFM, calculated from EBSD, and simulated by FEA.