Table 2.

Maximum stress side interface values for 165 GPa (silicon)/0.0002 GPa probe at the tip.

Frequency	Interface Stress (Pa) with 0.3 COF	Interface Stress (Pa) with 0.6 COF	Interface Stress (Pa) with 1 COF
1 Hz	325/14.7	304/6.62	291/3.92
5 Hz	607/12.9	570/5.27	545/2.92
10 Hz	857.5/11.6	813/3.7	764/2.96
15 Hz	1010/10	955/3.38	906/3.46
20 Hz	1149/9.3	1080/4.02	1011/3.67
30 Hz	1310/10	1230/5.06	1146/4.79
40 Hz	1400/10.8	1350/6.2	1260/5.53