Table 3.
Maximum strain side interface values for 165 GPa (silicon)/0.0002 GPa probe at the tip.
| Frequency | Side Interface Strain with 0.3 COF | Side Interface Strain with 0.6 COF | Side Interface Strain with 1 COF |
|---|---|---|---|
| 1 Hz | 0.0503/2.14e−3 | 0.0474/1.03e−3 | 0.0448/5.67e−4 |
| 5 Hz | 0.052/1.45e−3 | 0.049/6e−4 | 0.0463/3.29e−4 |
| 10 Hz | 0.0529/9.38e−4 | 0.0497/3.27e−4 | 0.0472/2.3e−4 |
| 15 Hz | 0.0535/7.11e−4 | 0.05/2.58e−4 | 0.0478/2.08e−4 |
| 20 Hz | 0.0539/5.91e−4 | 0.0511/2.42e−4 | 0.0487/1.94e−4 |
| 30 Hz | 0.054/5.24e−4 | 0.0514/2.42e−4 | 0.0487/2.06e−4 |
| 40 Hz | 0.0583/5.05e−4 | 0.0552/2.74e−4 | 0.0515/2.33e−4 |