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. 2016 May 25;16(6):758. doi: 10.3390/s16060758

Figure 4.

Figure 4

Frequency response curves, obtained through forward sweeps, of the clamped-clamped microbeam (a) for different DC voltages showing a transition from a linear to a softening behavior at 3.3 Torr; and (b) for different AC voltages showing the transition from linear to hardening behavior at 220 mTorr.