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. 2016 May 31;16(6):794. doi: 10.3390/s16060794

Figure 7.

Figure 7

The schematic diagram of key procedures. (a) The micro-cavity is machined by FIB. (b) A 95 nm thick gold thin film is sputtered. (c) The gold film on the left of the micro-cavity is removed by FIB milling. (d) A 5 nm thick gold thin film is sputtered. (e) Image of the fabricated sensor head.