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. 2016 Jul 11;6:29547. doi: 10.1038/srep29547

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(A) SEM micrograph of a fabricated PLV (m = 1) that represents the first layer of the MIM structure (fabrication steps 1 to 3); (B) SEM micrograph of the cross section of the three layers stack (after fabrication step 5); (C) SEM micrograph of a MIM structure with the central hole (case m = 6).