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| Cantilever | H(μm) | a(μm) | b(μm) | c(μm) | d(μm) | α1(°) | α2(°) | α3(°) | α4(°) |
|---|---|---|---|---|---|---|---|---|---|
| RFESP | 5.09 ± 0.10 | 3.20 ± 0.05 | 2.17 ± 0.04 | 1.87 ± 0.04 | 2.16 ± 0.04 | 114.26 ± 1.71 | 68.47 ± 1.30 | 66.89 ± 1.20 | 110.38 ± 1.87 |
| ORC8 | 3.75 ± 0.06 | 3.12 ± 0.06 | 3.10 ± 0.06 | 3.55 ± 0.07 | 3.45 ± 0.06 | 92.5 ± 1.67 | 90.7 ± 1.54 | 84.7 ± 1.52 | 92.06 ± 1.66 |
