Table 2.

Material properties.

Parameters	Cyclotene™ (BCB)	Gold (Au)	Low Resistivity Silicon 100 (Si)
Young’s modulus, E/GPa	2.9	70	165
Poisson’s ratio, ν	0.34	0.44	0.26
Density, ρ/kgm−3	1050	19,300	2329
Residual stress, σ/MPa	28	106	55
Relative permittivity, ε	2.6	6.9	11.8