Skip to main content
. 2016 Jun 30;60(1):101–110. doi: 10.1042/EBC20150011

Figure 3. (A) Optical micrograph of a coupled silicon MEMS resonator platform where the spatial separation between the sensor and transducer resonators is utilized to achieve electrical isolation and fluidic interfacing to sensing layer [45]; (B) image of the above device co-integrated with a microfluidic interface.

Figure 3.