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. Author manuscript; available in PMC: 2017 Jul 7.
Published in final edited form as: J Micro Nanolithogr MEMS MOEMS. 2016 Jul 7;15(3):034001. doi: 10.1117/1.JMM.15.3.034001

Fig. 1.

Fig. 1

Diagram outlining the major steps in our approach. This format is general for different objective functions and different parameter set updating algorithms (CMAES, DE, or MCMC).