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. Author manuscript; available in PMC: 2017 Jul 7.
Published in final edited form as: J Micro Nanolithogr MEMS MOEMS. 2016 Jul 7;15(3):034001. doi: 10.1117/1.JMM.15.3.034001

Fig. 14.

Fig. 14

Comparison of plots of the intensity fits found by the CMAES algorithm with Ξ function for the experimental target structure data. The figure shows the experimental data ITar plotted in black, a fit curve ISim plotted in green, and the residuals RI = ITarISim between the fit and experimental data plotted in magenta. (q1) Slice 1 qx = 0.223 nm−1. (q2) Slice 2 qx = 0.451 nm−1. (q3) Slice 3 qx =0.677 nm−1. (q4) Slice 4 qx = 0.905 nm−1.