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. Author manuscript; available in PMC: 2017 Jul 7.
Published in final edited form as: J Micro Nanolithogr MEMS MOEMS. 2016 Jul 7;15(3):034001. doi: 10.1117/1.JMM.15.3.034001

Fig. 17.

Fig. 17

Plots of the goodness of fit values for all three algorithms versus the normalized time t/τGen for the M = 3 experimental data set. Plots are on log base 10 scale. Inset is a key for which algorithm the colored curves correspond. The black dashed lines indicates the ΩTar values. Plots have all NRuns for the three algorithms of the goodness of fit values versus t/τGen superimposed. (a) Ω = χ2. (b) Ω = ψ. (c) Ω = Ξ.