Skip to main content
. Author manuscript; available in PMC: 2017 Jul 7.
Published in final edited form as: J Micro Nanolithogr MEMS MOEMS. 2016 Jul 7;15(3):034001. doi: 10.1117/1.JMM.15.3.034001

Fig. 2.

Fig. 2

Example trapezoid model based shape profiles used in calculating the SLD for the target intensities. The two main types of model parameter sets explored are those of a single column of periodic trapezoid features shown on the left (SC) and those of double columns of periodic features shown on the right (DC). Geometric model parameters are denoted in the figure.