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. Author manuscript; available in PMC: 2017 Jul 7.
Published in final edited form as: J Micro Nanolithogr MEMS MOEMS. 2016 Jul 7;15(3):034001. doi: 10.1117/1.JMM.15.3.034001

Fig. 7.

Fig. 7

Plot of the acceptance fraction fAcc (green) and average minimum goodness of fit value converged towards with standard uncertainty (black) for several MCMC algorithm runs at different σStep sizes. Uncertainty bars are standard uncertainty for 96 chains. The minimum goodness of fit value converged towards occurred around σStep ≅ 32. Here the objective function Ξ was used and normalized by the number ΞNorm to get the data comparable with the acceptance fractions (i.e. ΞNorm converts the goodness of fit value to arbitrary scaled units; a value of ΞNorm =3578 was used). At large σStep, the algorithm accepts many parameter set moves and thus works poorly. Conversely, at small σStep, the parameter set moves result in almost no acceptance events and the algorithm also works poorly. Thus the medium value of σStep = 32 where Ξ was minimized was used in further MCMC runs.