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. Author manuscript; available in PMC: 2017 Jul 7.
Published in final edited form as: J Micro Nanolithogr MEMS MOEMS. 2016 Jul 7;15(3):034001. doi: 10.1117/1.JMM.15.3.034001

Table 1.

Comparison of the normalized time to converge tConv/τGen within the given ΩTar value and the best ΩBest saturated goodness of fit values for the various algorithm and objective function combinations. Values of tConv/τGen are reported with standard uncertainty and averaged from all runs. ΩTar and ΩConv are listed for each objective function on the right for reference.

CMAES DE MCMC ΩTar ΩConv
χ2 tConv/τGen 45 ± 4 230 ± 20 650 ± 70 463.5 421.3
ΩBest 412.1 412.1 412.9
ψ tConv/τGen 50 ± 6 160 ± 30 510 ± 40 2307 2097
ΩBest 2097 2097 2098
Ξ tConv/τGen 35 ± 2 80 ± 10 520 ± 40 514.0 467.2
ΩBest 465.6 465.6 465.7