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. Author manuscript; available in PMC: 2017 Jul 7.
Published in final edited form as: J Micro Nanolithogr MEMS MOEMS. 2016 Jul 7;15(3):034001. doi: 10.1117/1.JMM.15.3.034001

Table 10.

Parameters with bounds used for SC M = 3 trapezoids experimental data structure. Units for Wj, Hj, and DW are all in nm.

Experiment W1 W2 W3 W4 H1 H2 H3 DW IExp IBk
Parameter Value 21.83 15.13 12.89 1.92 5.74 17.57 2.93 1.26 −2.22 0.49
Lower Bound 1 1 1 1 0.01 0.01 0.01 0 −5 0.01
Upper Bound 40 40 40 40 40 40 40 2 0 10