Table 11.

Comparison of various parameters found for symmetric periodic silicon grating line structure found using experimental data. CMAES with Ξ was used. The parameters presented are the best fit values (corresponding to the lowest goodness of fit values). For the cases of M = 1,2,4, and 5 only the total height H_Tot and full width at half max height W_FWHM were compared since the individual trapezoid components making up the structure in those cases are not comparable (NC).

Parameter	M = 1	M = 2	M = 3	M = 4	M = 5	Previous Study M = 3
HTot [nm]	25.66	26.65	26.55	26.97	26.73	26.24
H1 [nm]	NC	NC	7.80	NC	NC	5.74
H2 [nm]	NC	NC	16.15	NC	NC	17.57
H3 [nm]	NC	NC	2.59	NC	NC	2.93
WFWHM [nm]	13.55	13.85	13.87	13.92	13.97	14.19
W1 [nm]	NC	NC	21.36	NC	NC	21.83
W2 [nm]	NC	NC	14.67	NC	NC	15.13
W3 [nm]	NC	NC	12.30	NC	NC	12.89
W4 [nm]	NC	NC	1.84	NC	NC	1.92
DW [nm]	1.51	1.29	1.20	1.20	1.25	1.26
IExp	−2.33	−2.34	−2.36	−2.36	−2.33	−2.22
IBk	0.76	0.65	0.64	0.64	0.65	0.49
Ξ	0.236	0.199	0.186	0.185	0.187	0.195