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. Author manuscript; available in PMC: 2017 Jul 7.
Published in final edited form as: J Micro Nanolithogr MEMS MOEMS. 2016 Jul 7;15(3):034001. doi: 10.1117/1.JMM.15.3.034001

Table 2.

Comparison of various parameters found for symmetric periodic silicon grating line structure found using experimental data. CMAES with Ξ was used (normalized by Nq − 1 here). The parameters presented are the ΩBest values. For the cases of M = 1, 2, 4, and 5 only the total height HTot and full width at half max height WFWHM were compared since the individual trapezoid components making up the structure in those cases are not comparable.

Parameter M = 1 M = 2 M = 3 M = 4 M = 5 Previous Study M = 3
HTot [nm] 25.66 26.65 26.55 26.97 26.73 26.24
WFWHM [nm] 13.55 13.85 13.87 13.92 13.97 14.19
DW [nm] 1.51 1.29 1.20 1.20 1.25 1.26
IExp −2.33 −2.34 −2.36 −2.36 −2.33 −2.22
IBk 0.76 0.65 0.64 0.64 0.65 0.49
ΩBest → Ξ 0.236 0.199 0.186 0.185 0.187 0.195