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. Author manuscript; available in PMC: 2017 Jul 7.
Published in final edited form as: J Micro Nanolithogr MEMS MOEMS. 2016 Jul 7;15(3):034001. doi: 10.1117/1.JMM.15.3.034001

Table 3.

The relative fractional percentage each slice contributed to the total goodness of fit for each Ω in its own basis using the CMAES algorithm. Values are calculated using the objective function noted at the top of table.

χ2 ψ Ξ
% Slice qj Contributes to Total Ω
q1 (qx =0.223 nm−1) 99.5 % 91.0 % 48.3 %
q2 (qx =0.451 nm−1) 0.3 % 4.5 % 42.2 %
q3 (qx =0.677 nm−1) 0.1 % 2.9 % 4.5 %
q4 (qx =0.905 nm−1) 0.1 % 1.6 % 5.0 %