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. Author manuscript; available in PMC: 2017 Jul 7.
Published in final edited form as: J Micro Nanolithogr MEMS MOEMS. 2016 Jul 7;15(3):034001. doi: 10.1117/1.JMM.15.3.034001

Table 4.

Target parameters with bounds used for SC M = 1 trapezoid target structure. Units for Wj, Hj, and DW are all in nm.

SC M =1 WB WT H DW IExp IBk
Parameter Value 30 10 15 0.5 −2 0.5
Lower Bound 1 1 1 0 −5 0.01
Upper Bound 40 40 40 2 0 1