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Target parameters with bounds used for SC M = 3 trapezoids target structure. Units for Wj, Hj, and DW are all in nm.
| SC M = 3 | W1 | W2 | W3 | W4 | H1 | H2 | H3 | DW | IExp | IBk |
|---|---|---|---|---|---|---|---|---|---|---|
| Parameter Value | 35 | 25 | 15 | 5 | 7 | 25 | 4 | 0.5 | −2 | 0.5 |
| Lower Bound | 1 | 1 | 1 | 1 | 1 | 1 | 1 | 0 | −5 | 0.01 |
| Upper Bound | 40 | 40 | 40 | 40 | 40 | 40 | 40 | 2 | 0 | 1 |
