| U11 | U22 | U33 | U12 | U13 | U23 | |
| Si1 | 0.0459 (6) | 0.0491 (6) | 0.0323 (5) | 0.0052 (4) | 0.000 | 0.000 |
| O1 | 0.0573 (12) | 0.0531 (11) | 0.0402 (11) | −0.0034 (9) | −0.0045 (8) | 0.0066 (8) |
| N1 | 0.0552 (19) | 0.0534 (18) | 0.0344 (16) | 0.0052 (14) | 0.000 | 0.000 |
| N2 | 0.0658 (15) | 0.0622 (14) | 0.0390 (13) | 0.0115 (12) | 0.0092 (11) | 0.0023 (11) |
| N3 | 0.0516 (13) | 0.0526 (13) | 0.0366 (12) | 0.0080 (10) | 0.0062 (10) | 0.0035 (9) |
| N4 | 0.0455 (12) | 0.0558 (13) | 0.0387 (12) | 0.0043 (10) | 0.0028 (10) | 0.0038 (9) |
| N5 | 0.0434 (16) | 0.0514 (17) | 0.0295 (15) | 0.0019 (13) | 0.000 | 0.000 |
| C1 | 0.066 (2) | 0.097 (2) | 0.0342 (15) | 0.0023 (16) | 0.0047 (14) | −0.0033 (15) |
| C2 | 0.0594 (18) | 0.080 (2) | 0.0410 (16) | 0.0041 (15) | 0.0065 (14) | −0.0070 (14) |
| C3 | 0.0555 (16) | 0.0632 (17) | 0.0395 (15) | −0.0014 (13) | −0.0014 (13) | −0.0007 (12) |
| C4 | 0.0522 (15) | 0.0568 (16) | 0.0363 (14) | 0.0049 (13) | 0.0058 (12) | −0.0003 (11) |
| C5 | 0.0628 (18) | 0.0565 (16) | 0.0411 (16) | 0.0103 (14) | 0.0108 (13) | 0.0017 (12) |
| C6 | 0.0665 (19) | 0.0603 (17) | 0.0490 (17) | 0.0188 (14) | 0.0146 (14) | 0.0095 (13) |
| C7 | 0.091 (3) | 0.077 (2) | 0.059 (2) | 0.032 (2) | 0.0247 (18) | 0.0101 (17) |
| C8 | 0.088 (3) | 0.080 (2) | 0.086 (3) | 0.039 (2) | 0.024 (2) | 0.016 (2) |
| C9 | 0.075 (2) | 0.080 (2) | 0.084 (3) | 0.034 (2) | 0.007 (2) | 0.0160 (19) |
| C10 | 0.0606 (18) | 0.0678 (19) | 0.0586 (18) | 0.0153 (15) | 0.0047 (15) | 0.0135 (15) |
| C11 | 0.0535 (16) | 0.0553 (16) | 0.0518 (18) | 0.0100 (13) | 0.0095 (13) | 0.0102 (13) |
| C12 | 0.0447 (14) | 0.0535 (15) | 0.0437 (15) | 0.0061 (12) | 0.0029 (12) | 0.0086 (12) |
| C13 | 0.0395 (13) | 0.0524 (14) | 0.0379 (14) | −0.0013 (11) | −0.0006 (11) | 0.0006 (11) |
| C14 | 0.0406 (13) | 0.0557 (15) | 0.0379 (14) | −0.0030 (11) | 0.0018 (11) | 0.0012 (11) |
| C15 | 0.0486 (15) | 0.0730 (19) | 0.0403 (15) | 0.0000 (13) | −0.0051 (13) | 0.0035 (13) |
| C16 | 0.0605 (18) | 0.082 (2) | 0.0365 (14) | −0.0010 (15) | −0.0072 (14) | 0.0028 (14) |
| C17 | 0.0517 (16) | 0.0635 (18) | 0.0530 (17) | −0.0010 (13) | 0.0000 (14) | 0.0167 (14) |
| C18 | 0.0513 (17) | 0.098 (2) | 0.0487 (18) | −0.0062 (16) | −0.0014 (14) | 0.0108 (17) |
| C19 | 0.072 (2) | 0.159 (5) | 0.068 (3) | −0.022 (3) | 0.008 (2) | 0.037 (3) |
| C20 | 0.117 (4) | 0.122 (4) | 0.129 (4) | −0.012 (3) | 0.013 (3) | 0.076 (4) |
| C21 | 0.127 (4) | 0.085 (3) | 0.164 (5) | 0.008 (3) | 0.054 (4) | 0.058 (3) |
| C22 | 0.092 (3) | 0.059 (2) | 0.120 (3) | 0.000 (2) | 0.033 (2) | 0.022 (2) |
| C23 | 0.155 (5) | 0.059 (2) | 0.171 (5) | −0.016 (3) | 0.082 (4) | −0.007 (3) |
| C24 | 0.259 (8) | 0.144 (5) | 0.135 (5) | −0.085 (6) | 0.066 (5) | −0.030 (4) |
| C25 | 0.143 (5) | 0.085 (3) | 0.316 (9) | −0.011 (4) | 0.099 (6) | −0.056 (5) |
| C26 | 0.183 (7) | 0.172 (7) | 0.324 (11) | 0.024 (6) | 0.067 (8) | −0.090 (8) |