Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
(a) PMMA495/MMA (150/250 nm), (b) PMMA950 (130 nm), (c) PMMA950:ZEP A (50 nm), (d) PMMA950:ZEP A (40 nm), (e) PMMA950:ZEP A (30 nm) and (f) PMMA950:ZEP A (15 nm). Influence of the exposure gaps in PMMA950:ZEP A (1:1.5) resist on the nanowire density; (g) 45 nm, (h) 30 nm and (i) 20 nm gaps.
