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TEM images of air samples obtained in the cleanroom, subfab, and WWT. a – b) Agglomerates of amorphous Si from WWT task area. Scale bars = 100nm. c) Alumina from worker PBZ in WWT. Scale bar = 100nm. d) Mixed Al-Si agglomerate from WWT background. Scale bar = 0.2μm. e) Agglomerate of amorphous Si from subfab task area. Scale bar = 100nm. f) Agglomerate of alumina from the cleanroom task area. Scale bar = 100nm.
