TABLE II.
Filter-based air samples: concentration of aluminum oxide (MCE filters)
| Sample Type (mg/m3)A |
Sampling Location Average Flow Rate (L/min) |
Process/Task Air Volume (L) |
Total Time Sampled (min) Total Concentration |
||||
|---|---|---|---|---|---|---|---|
| Task Area | WWT | 3ft from filter change task | 36 | 5.52 | 199 | ND | |
| Task Area | Subfab | changing tanks and replenishing batch | 28 | 5.51 | 154 | ND | |
| Background | Subfab | 15ft from tanks | 189 | 5.50 | 1,040 | ND | |
| Task Area | WWT | filter and pre-filter change of acid tank | 37 | 5.60 | 206 | ND | |
| Task Area | Cleanroom ND |
on workstation operator’s table near CMP tool | 45 | 5.60 | 250 | ||
| Task Area | Subfab | 2ft from slurry system | 19 | 5.78 | 109 | ND | |
A
Limit of detection (2μg/sample).