TABLE III.

Filter-based air samples: differential particle filter concentrations as determined by electron microscopy and energy-dispersive x-ray spectroscopy (MCE filters)

Type	Sampling Location		Sample Process/Task		Total Time Sampled (min) Average
Flow Rate (L/min)		Air Volume (L)	Si p/cm3	Al p/cm3	Mixed Al and Si p/cm3
Task Area	WWT 0.011	3ft from filter change task		37	5.55	205	0.559	0.232
Background	WWT 0.002	on cart, 20ft from task area		349	5.81	2,028	0.084	0.023
PBZ	WWT	filter changes	39A	5.97	233A	0.328	0.599	ND
PBZ	Subfab 0.156	tank change; mock-up replenish batch ND			22	5.5	121	0.068
Task Area	Subfab ND	changing tanks and replenishing batch 0.002			28	5.82	163	0.014
Background	Subfab	15ft from tanks	189	5.59	1,057	0.225	0.149	ND
PBZ	WWT ND	filter and pre-filter change of acid tank ND			33	5.51	183	0.113
Task Area	WWT ND	filter and pre-filter change of acid tank ND			37	5.69	213	0.078
PBZ	Cleanroom ND	set-up of CMP tool		25	5.81	142	0.023	0.010
Task Area	Cleanroom	on workstation operator’s table near CMP tool				45	5.69	259
	0.240	0.074	ND
Background	Cleanroom	5ft from CMP tool	209	5.64	1,167	0.206	0.124	ND
Task Area	Subfab ND	2ft from slurry system		19	5.07	101	0.536	0.170

^APump failed during sampling; time estimated.