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Process flow for the fabrication of PDMS pillar arrays with μgrooves. (a) 4 inch silicon substrate; (b) coating SU-8 2007 thin layer for increasing adhesion between the silicon substrate and SU-8 2002 layer; (c) coating SU-8 2002 negative photoresist for µgroove pattern; (d) coating high viscosity SU-8 2050 for µpuillar negative body mold; (e) PDMS pouring in to the negative mold; (f) PDMS layer release from the SU-8 mold.
