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The structures and thicknesses of annealed samples S1~S5
| Sample | Film structures | Thickness (nm) |
|---|---|---|
| S1 | 1 × (40-cycle Al2O3 + 40-cycle La2O3) | 7.06 |
| S2 | 2 × (20-cycle Al2O3 + 20-cycle La2O3) | 7.02 |
| S3 | 4 × (10-cycle Al2O3 + 10-cycle La2O3) | 6.99 |
| S4 | 40 × (1-cycle Al2O3 + 1-cycle La2O3) | 7.57 |
| S5 | 4 × (20-cycle Al2O3 + 20-cycle La2O3) | 13.4 |
The samples were annealed at 600 °C for 60 s
