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The annealing conditions and thicknesses of samples S2 and S6~S10
| Sample | Temperature (°C) | Duration (s) | Thickness (nm) |
|---|---|---|---|
| S2 | 600 | 60 | 7.02 |
| S6 | 700 | 60 | 7.21 |
| S7 | 800 | 60 | 7.20 |
| S8 | 600 | 30 | 7.08 |
| S9 | 600 | 90 | 7.07 |
| S10 | 600 | 120 | 7.12 |
Samples S6~S10 have the same film structure with S2: 2 × (20-cycle Al2O3 + 20-cycle La2O3)
