Figure 1. Schematic of the photomask.
Overview and details of the 5-inch photomask presenting both post (A-B) and cap (A’-B’) features that can be aligned by a 180° rotation of the photomask. Dimensions of the features are given in Fig. 3.
Overview and details of the 5-inch photomask presenting both post (A-B) and cap (A’-B’) features that can be aligned by a 180° rotation of the photomask. Dimensions of the features are given in Fig. 3.