Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
| Current (nA) | Development time (min.) | Dose (μC/cm2) | Writing time for 1 mm2 (min.) | Resonance (TM) |
|
|---|---|---|---|---|---|
| FWHM (nm) | Q | ||||
| 0.855 | 2 | 145 | 6.8 | 1.66 | 499 |
| 4.001 | 20 | 70 | 1.0 | 1.71 | 486 |
(Area step size are set to 16 nm).
