Table 1.

Deposition parameters for samples, Al composition of AZO films via XPS, and film thicknesses fitted by SE

Samples	DEZ-H2O/TMA-H2O cycle ratio	N1	N2	N	at. %Al	Thicknesses (nm)
ZnO	–	–	200	200	–	41.2
AZO 50:1	50:1	4	200	204	3.7 %	41.7
AZO 20:1	20:1	10	200	210	4.9 %	44.3
AZO 10:1	10:1	20	200	220	7.1 %	46.8
AZO 5:1	5:1	40	200	240	12.7 %	48.6