TABLE I.

Device parameters.

Position	W1 (μm)	H1 (μm)	L1 (μm)	W2 (μm)	H2 (μm)	L2 (μm)	Q1/Q2	ΔP (Pa) (Q = 1 μl/min)
1	5	5	25	80	40.9	4251	0.0121	114.4
2	5	5	25	80	40.9	4151	0.0118	111.7
3	5	5	25	80	40.9	4051	0.0115	109.0
4	5	5	25	80	40.9	3951	0.0112	106.3
5	5	5	25	80	40.9	3851	0.0109	103.7
6	5	5	25	80	40.9	3751	0.0106	101.0
7	5	5	25	80	40.9	3651	0.0103	98.2
8	5	5	25	80	40.9	3551	0.01	95.6
9	5	5	25	80	40.9	3451	0.0097	92.9
10	5	5	25	80	40.9	3351	0.0094	90.2
11	5	5	25	80	40.9	3251	0.0091	87.5
12	5	5	25	80	40.9	3151	0.0088	84.8
13	5	5	25	80	40.9	3051	0.0085	82.1