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. 2016 Sep 26;6:34003. doi: 10.1038/srep34003

Figure 1. Specially enhanced FEBID process.

Figure 1

(a) Conventional FEBID Au process (b) Water-assisted FEBID Au process (c) Conventional FEBID Au structure, (d) Water-assisted FEBID Au, (e) Atomic composition obtained from SEM EDX for different chamber pressures.