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. 2016 Sep 26;6:34003. doi: 10.1038/srep34003

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Copyright © 2016, The Author(s)

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(a) HAADF STEM image of the assisted FEBID gold structure. The image reveals a mass contrast among the germanium substrate, the FEBID gold deposit, the sputtered chrome layer, and the applied FEBID platinum layer. The grey area between the chrome layer and Ge is halo deposition from secondary electrons. (b) TEM EDX spectrum of water-assisted FEBID gold structure. (c) TEM EDX line scan along the z-axis of the deposition (marked with a red line in a). (d) TEM EDX quantification results.