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. 2015 Mar 17;16(2):025001. doi: 10.1088/1468-6996/16/2/025001

Figure 3.

Figure 3.

Etched depth of the micro-holes as a function of total etched volume. The black squares, blue circles, and red triangles indicate samples fabricated by single-step etching, multi-step etching, and multi-step etching with SiO2 interlayer, respectively.