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. 2016 Sep 29;6:34294. doi: 10.1038/srep34294

Figure 3.

Figure 3

(a) Cross-sectional BF TEM image of NbO2 MIM device with Cr/Pt/TiN top electrode and TiN/W bottom electrode; the material stacking is shown in the inset. (b) High resolution TEM image shows the microstructure of the stacks. Elemental color mapping from STEM/EELS spectrum image shows the composition of Cr, Pt, Ti, and Nb in (c) and O in (d).