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. 2016 Oct 11;11:454. doi: 10.1186/s11671-016-1665-5

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© The Author(s). 2016

Open AccessThis article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.

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Fig. 3 — AFM imaging of 30 nm thick film a pristine and after irradiation using 80 keV Ar⁺ ion beam at the following fluence values: b 0.25 × 10¹⁷ ions/cm², c 0.75 × 10¹⁷ ions/cm² and d 1.0 × 10¹⁷ ions/cm²