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(A) Optical image of US Air Force resolution target group 7 showing the region that was scanned for the OA inage. (B) OA image showing part of group 7 scanned with step resolution of 0.7 μm. (C) Higher resolution OA image of smallest region of the target (region 6 in group 7), scanned with step resolution of 0.47 μm. The pixel value is inverted compared to the image in panel B.
