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Electrochemical properties of the Li3OCl films deposited from the composite target. a) EIS Nyquist plot measured at room temperature (RT) and the corresponding fitted curves. b) Arrhenius plot for Li3OCl film measured up to 140 °C. c) Cyclability of the Li/Li3OCl/Li symmetric cell. The RT ionic conductivity of the Li3OCl films was determined to be 2.0 × 10−4 S cm−1 and the activation energy E a is derived to be 0.35 eV from the slope of the fitted line of log(σT) versus 1000/T.
